Dielectric properties of (Ba,Sr)TiO3 thin films deposited on Ni/TiN/Si substrate by photo-assisted metal organic chemical vapor deposition

IEEE International Symposium on Applications of Ferroelectrics

Volumn , Issue , 1998, Pages 43-46

  Chen, Y M ^a   Ritums, D ^a   Wu, N J ^a   Ignatiev, A ^a  

^a UNIVERSITY OF HOUSTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM TITANATE; CAPACITORS; CRYSTAL ORIENTATION; ELECTROCHEMICAL ELECTRODES; HETEROJUNCTIONS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NICKEL; PERMITTIVITY; SILICON; SUBSTRATES; THIN FILMS; TITANIUM COMPOUNDS;

PHOTO-ASSISTED METALLORGANIC CHEMICAL VAPOR DEPOSITION (PHMOVCD);

DIELECTRIC FILMS;

EID: 0032286590     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (6)