Development of mesoscale actuator device with microinterlocking mechanism

Journal of Intelligent Material Systems and Structures

Volumn 9, Issue 6, 1998, Pages 449-457

  Chen, Quanfang ^a   Yao, D A Jeng ^a   Carman, Greg P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL; FERROELECTRIC DEVICES; FRICTION; PIEZOELECTRIC MATERIALS; SILICON; SINGLE CRYSTALS; SURFACE ROUGHNESS;

MESOSCALE ACTUATOR DEVICE; MICROINTERLOCKING;

ACTUATORS;

EID: 0032285687     PISSN: 1045389X     EISSN: None     Source Type: Journal    
DOI: 10.1177/1045389X9800900606     Document Type: Article

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