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Volumn 2, Issue , 1998, Pages 1011-1015
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Rapid modeling technique for measurable improvements in factory performance
a a a
a
SIEMENS AG
(Germany)
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Author keywords
[No Author keywords available]
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Indexed keywords
PHOTOLITHOGRAPHY;
PRODUCTION ENGINEERING;
RAPID PROTOTYPING;
SEMICONDUCTOR DEVICE MANUFACTURE;
THROUGHPUT;
DISCRETE EVENT SIMULATION (DES);
COMPUTER SIMULATION;
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EID: 0032284159
PISSN: 02750708
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (19)
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References (7)
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