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Volumn 2, Issue , 1998, Pages 985-991
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Silicon micromachined ultrasonic transducers
a a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CAPACITORS;
MATHEMATICAL MODELS;
MICROMACHINING;
SILICON SENSORS;
CAPACITIVE TRANSDUCERS;
MICROMACHINED ULTRASONIC TRANSDUCERS (MUTS);
SILICON MICROMACHINING;
ULTRASONIC TRANSDUCERS;
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EID: 0032284084
PISSN: 10510117
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
Times cited : (24)
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References (8)
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