High power SAW filter with new Al-Sc-Cu/Ti/Al-Sc-Cu/Ti electrodes

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1998, Pages 5-8

  Takayama, R ^a   Furukawa, M ^a   Murashima, Y ^a   Sakuragawa, T ^a   Yuda, N ^a   Nomura, K ^a  

^a Matsushita Electronic Components Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM ALLOYS; DEPOSITION; ELECTRODES; METALLIC FILMS; REACTIVE ION ETCHING; TITANIUM; ULTRASONIC TRANSDUCERS;

INTERDIGITAL TRANSDUCERS (IDT);

ACOUSTIC SURFACE WAVE FILTERS;

EID: 0032283882     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (6)