Development of three-dimensional unstructured mesh generator for the semiconductor process simulation

Journal of the Korean Physical Society

Volumn 33, Issue SUPPL. 2, 1998, Pages

  Won, Taeyoung ^a  

^a Inha University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032282679     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)

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2. G. Garreton, L. Villablanca, N. Strecker and W. Fichtner, Simulation of Semiconductor Devices and Processes 6, 468 (1995).
3. R. Mlekus and S. Selberherr, Simulation of Semiconductor Devices and Processes 6, 50 (1995).
4. D. Du and F. Hwang, Computing in Euclidean Geometry (World Scientific, 1995), Mesh Generation and Optimal Triangulation.
5. P. L. George and F. Hermeline, International Journal for Numerical Methods in Engineering 33, 975 (1992).
6. J. C. Cavendish, D. A. Field and W. H. Frey, International Journal for Numerical Methods in Engineering 21, 329 (1985).
7. P. Fleischmann and S. Selberherr, SISPAD'96, 129 (1996).
8. O. C. Zienkiewicz, The Finite Element Method (McGraw-Hill, 1989), Chap. 7.
9. J. H. Lee, S. H. Yoon, J. B. Song, Y. T. Kim and T. Won, Journal of the Korea Institute of Telematics and Electronics 34-D, 174 (1997).