Heteroepitaxial growth of CoSi2 on Si(100) substrate by Co/Si/Ti/Si multilayer solid phase reaction

Acta Metallurgica Sinica (English Letters)

Volumn 11, Issue 5, 1998, Pages 641-645

  Qu, Xinping ^a   Li, Bingzong ^a   Ru, Guoping ^a   Cu, Zhiguang ^a   Xu, Hongtao ^a   Mo, Hongxiang ^a   Liu, Jing ^a   Paul, Chu ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

MULTILAYERS; SEMICONDUCTING SILICON COMPOUNDS;

HETEROEPITAXIAL GROWTH; SOLID PHASE REACTION;

EPITAXIAL GROWTH;

EID: 0032282652     PISSN: 10067191     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)