Structural study of thermal-oxide films on silicon by cathodoluminescence

Physics of the Solid State

Volumn 40, Issue 11, 1998, Pages 1797-1801

  Zamoryanskaya, M V ^a   Sokolov, V I ^a  

^a IOFFE INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032282261     PISSN: 10637834     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1130659     Document Type: Article

References (6)

1. V. I. Sokolov and N. A. Fedorovich, Phys. Status Solidi A 99, 151 (1987).
2. F. Maurice, L. Meny, and R. Tixier, Microanalysis and Scanning Electron Microscopy (Les Editions de Physique, 1978), p. 527.
3. M. V. Zamoryanskaya, A. N. Zamoryanskiǐ, and I. A. Vaǐnshenker, Prib. Tekh. Éksp. No. 4, 161 (1987).
4. 2 [in Russian] (Riga, Zinatne, 1985), 243 pp.
5. A. N. Trukhin and A. E. Plaudis, Fiz. Tverd. Tela (Leningrad) 21, 1109 (1979) [Sov. Phys. Solid State 21, 644 (1979)].
6. A. N. Trukhin and A. E. Plaudis, Fiz. Tverd. Tela (Leningrad) 21, 1109 (1979) [Sov. Phys. Solid State 21, 644 (1979)].