Relationship between silicon micromechanical resonators and excited point

Guangxue Xuebao/Acta Optica Sinica

Volumn 18, Issue 10, 1998, Pages 1445-1448

  Yu, Hao ^a   Ding, Chun ^a   Wang, Yuelin ^a   Wang, Yaqiang ^a   Jin, Zhonghe ^a   Xu, Yigang ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; SILICON SENSORS;

OPTICAL EXCITATION; SILICON MICROMECHANICAL RESONATORS;

OPTICAL DEVICES;

EID: 0032279470     PISSN: 02532239     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (4)