Current-voltage properties of piezoelectric thin film ZnO in a micromechanical force sensor

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1998, Pages 593-596

  Yuan, W ^a   Smits, J G ^a   Dominguez, P ^a   Cantor, C R ^a   Smith, C L ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; PIEZOELECTRIC MATERIALS; SEMICONDUCTING ZINC COMPOUNDS; SENSORS; THIN FILMS;

MICROMECHANICAL FORCE SENSORS;

SEMICONDUCTING FILMS;

EID: 0032277657     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (13)