High levels of IC manufacturability: One of the necessary prerequisites of the 1997 SIA roadmap vision

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1998, Pages 759-762

  Maly, W ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COST ACCOUNTING; DIES; INTEGRATED CIRCUIT LAYOUT;

DESIGN FOR MANUFACTURABILITY;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0032277573     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)