Laser probing and FEM modeling of ultrasonically vibrating surfaces

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 1998, Pages 1143-1146

  Tikka, P T ^a   Kaitila, J ^a   Ylilammi, M ^a   Makkonen, T ^a   Knuuttila, J V ^a   Hashimoto, K ^a   Salomaa, M M ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; EIGENVALUES AND EIGENFUNCTIONS; FINITE ELEMENT METHOD; INTERFEROMETRY; LASER DIAGNOSTICS; MATHEMATICAL MODELS; PHOTOLITHOGRAPHY; PIEZOELECTRIC MATERIALS; PROBES; THIN FILMS; VIBRATIONS (MECHANICAL);

PIEZOELECTRIC THIN FILMS; SCANNING LASER INTERFEROMETRIC METHOD;

ULTRASONICS;

EID: 0032277352     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (6)