Optimum collimator for proximity X-ray lithography - theoretical analysis

Journal of X-Ray Science and Technology

Volumn 8, Issue 3, 1998, Pages 199-220

  Artioukov, Igor A ^a   Kozhevnikov, Igor V ^a   Kozhevnikova, Nataliya I ^a  

^a LEBEDEV PHYSICAL INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

LASER BEAMS; OPTICAL COLLIMATORS; X RAY LASERS;

X RAY OPTICS; X RAY PROXIMITY LITHOGRAPHY;

X RAY LITHOGRAPHY;

EID: 0032277260     PISSN: 08953996     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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