Structure and properties of carbon and hydrocarbon films deposited in plasma of low-pressure arc and unbalanced DC magnetron

High Temperature Material Processes

Volumn 2, Issue 1, 1998, Pages 143-154

  Anisimova, I A ^a   Anisimov, V P ^a   Makarov, V P ^a   Otorbaev, D K ^a  

^a Kyrgyz National Academy of Sciences   (Kyrgyzstan)

Author keywords

Hydrocarbon films; Plasma deposition

Indexed keywords

EID: 0032277248     PISSN: 10933611     EISSN: None     Source Type: Journal    
DOI: 10.1615/HighTempMatProc.v2.i1.110     Document Type: Article

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