Integrated array of SAW sensors for gas analysis

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1998, Pages 529-534

  Anisimkin, V I ^a   Fedosov, V I ^a   Krystal, R G ^a   Medved, A V ^a   Zemlyakov, V E ^a   Verona, E ^a  

^a RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC ARRAYS; ACOUSTIC SURFACE WAVE DEVICES; ATMOSPHERIC HUMIDITY; CARBON MONOXIDE; HYDROGEN; MEMBRANES; METALLIC FILMS; NITROGEN; NITROGEN OXIDES; PALLADIUM; QUARTZ; SUBSTRATES;

INTEGRATED SENSOR ARRAYS;

CHEMICAL SENSORS;

EID: 0032277182     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)