High resolution laser-interferometric probing of SAW devices

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1998, Pages 235-238

  Knuuttila, Jouni ^a   Tikka, Pasi ^a   Thorvaldsson, Thor ^a   Hashimoto, Ken ya ^a   Salomaa, Martti M ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; COMPUTER CONTROL; INTERFEROMETRY; LASER APPLICATIONS; SCANNING; ULTRASONIC TRANSDUCERS; VIBRATIONS (MECHANICAL);

LASER INTERFEROMETRY; SINGLE PHASE UNIDIRECTIONAL TRANSDUCER (SPUDT) FILTERS;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 0032273885     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (3)