Design a multi-finger silicon micromechanical accelerometer

Qinghua Daxue Xuebao/Journal of Tsinghua University

Volumn 38, Issue 11, 1998, Pages 38-41

  Yuan, Guang ^a   Ding, Henggao ^a   Gao, Zhongyu ^a   Dong, Jingxin ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION MEASUREMENT; FINITE ELEMENT METHOD; MICROSENSORS; SILICON ON INSULATOR TECHNOLOGY;

FINITE ELEMENT ANALYSIS; MICROMECHANICAL ACCELEROMETER;

ACCELEROMETERS;

EID: 0032272230     PISSN: 10000054     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (4)