Development of ZnO thin films for SAW devices by the ultrasonic spray pyrolysis technique

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1998, Pages 323-326

  Kim, Hagbong ^a   Lee, Youngjin ^a   Roh, Yongrae ^a   Jung, Jinyoung ^a   Lee, Manhyeong ^a   Kwon, Hyukchae ^a  

^a Kyungpook National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; PIEZOELECTRICITY; PRESSURE EFFECTS; PYROLYSIS; SILICA; SILICON; THERMAL EFFECTS; THIN FILMS; ULTRASONIC APPLICATIONS; ULTRASONIC TRANSDUCERS; ULTRASONIC VELOCITY; ZINC OXIDE;

RAYLEIGH WAVES; ULTRASONIC PYROLYSIS TECHNIQUE;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 0032271748     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (5)