Sensitivity of the parameters of covariance based response surfaces

International Workshop on Statistical Metrology, Proceedings, IWSM

Volumn , Issue , 1998, Pages 50-53

  Waring, T G ^a   Walton, A J ^a   Ferguson, S ^a   Sprevak, D ^a  

^a UNIVERSITY OF EDINBURGH   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; ELECTRIC NETWORK SYNTHESIS; ERROR ANALYSIS; POLYNOMIALS; RANDOM PROCESSES; SEMICONDUCTOR DEVICE MODELS;

DESIGN OF EXPERIMENTS (DOE); RESPONSE SURFACE METROLOGY (RSM); TECHNOLOGY COMPUTER AIDED DESIGN (TCAD);

INTEGRATED CIRCUIT LAYOUT;

EID: 0032271483     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (14)