The role of spacer-bottom oxide on the hot carrier reliability in sub-half micron LDD nMOSFET with nitride spacer

Journal of the Korean Physical Society

Volumn 33, Issue SUPPL. 2, 1998, Pages

  Choy, J H ^a   Byeon, J H ^a   Kim, Y C ^a   Kim, J H ^a   Song, D H ^a  

^a Hynix Semiconductor Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032271388     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)

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6. H. M. Yang, T. K. Kang, C. Y. Kang, W. S. Yang and Y. J. Lee, Proceedings of the Korean Conference on Semiconductors, ISRC, Seoul 163 (1998).