Dissociation of SiCl4 based on Cl- AND Si-concentration measurements

Symposium (International) on Combustion

Volumn 27, Issue 1, 1998, Pages 261-267

  Kunz, A ^a   Roth, P ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; CHLORINE COMPOUNDS; COMBUSTION; DISSOCIATION; ATOMIC SPECTROSCOPY; COMPUTER SIMULATION; PYROLYSIS; RATE CONSTANTS; SHOCK WAVES; SILICON COMPOUNDS;

ATOMIC RESONANCE ABSORPTION SPECTROSCOPY; RATE COEFFICIENTS; REACTION MECHANISM; SI ATOMS; SI CONCENTRATION; TIME RESOLVED MEASUREMENT;

SILICON COMPOUNDS; COMBUSTION;

ATOMIC RESONANCE ABSORPTION SPECTROSCOPY (ARAS); SILICON TETRACHLORIDE;

EID: 0032270362     PISSN: 00820784     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0082-0784(98)80413-X     Document Type: Conference Paper

References (22)

1. Krimmel, E. F. and Hezel, R., Si, Silicon; Silicon Nitride in Microelectronics and Solar Cells, Gmelin Handbook of Inorganic and Organometallic Chemistry, vol. B5e, 8th ed., Springer, Berlin, 1991.
2. x:H, Gmelin Handbook of Inorganic and Organometallic Chemistry, vol. B5e, 8th ed., Springer, Berlin, 1994.
3. Hung, C.-H. and Katz, J. L., J. Mater. Res. 7:1861-1869 (1992).
4. Wooldridge, M. S., Prog. Energy Combust. Sci. 24:63-87 (1998).
5. Ring, T. A., Fundamentals of Ceramic Powder Processing and Synthesis. Academic Press, New York, 1996.
6. Powers, D. R., J. Am. Ceram. Soc. 61:295-297 (1978).
7. Catoire, L., Woiki, D., and Roth, P., Int. J. Chem. Kinet. 29:415-420 (1997).
8. Su, M.-D. and Schlegel, H. B., J. Phys. Chem. 97:9981-9985 (1993).
9. Lim, K. P. and Michael, J. V., J. Chem. Phys. 98:3919-3928 (1993).
10. Lim, K. P. and Michael, J. V., in Proc. of Symposium on Combustion Chemistry and Soot Formation 207th American Chemical Society, Fuel Chemistry Division 39, 1994, pp. 131-135.
11. Dean, L. A. and Rains, T. C., Flame Emission and Atomic Absorption Spectrometry, vol. 3, Marcel Dekker, New York, 1975.
12. Husain, D. and Norris, P. E., J. Chem. Soc., Faraday Trans. 2 74:106-114 (1978).
13. Mick, H. J., Smirnov, V. N., and Roth, P., Ber. Bunsen-Ges. Phys. Chem. 97:793-798 (1993).
14. Kee, R. J., Rupley, F. M., and Miller, J. A., The CHEMKIN Thermodynamic Data Base, Sandia report SAND87-8215B, 1994.
15. Chase Jr., M. W., Davies, C. A., Downey Jr., J. R., Frurip, D. J., McDonald, R. A., and Syverud, A. N., J. Phys. Chem. Ref. 14:785-835 (1985).
16. Ho, P., Coltrin, M. E., Binkley, J. S., and Melius, C. F., J. Phys. Chem. 89:4647-4654 (1985).
17. Allendorf, M. D. and Melius, C. F., J. Phys. Chem. 97:720-728 (1993).
18. Swihart, M. T. and Carr, R. W., J. Phys. Chem. A 101:7434-7445 (1997).
19. Swihart, M. T. and Carr, R. W., J. Phys. Chem. A 102:785-792 (1998).
20. Weber, M. E. and Armentrout, P. B., J. Phys. Chem. 93:1596-1604 (1989).
21. Bauschlicher Jr., C. W. and Partridge, H., Chem. Phys. Lett. 276:47-54 (1997).
22. Lutz, A. E., Kee, R. J., and Miller, J. A., SENKIN: A Fortran Program for Predicting Homogeneous Gas Phase Chemical Kinetics with Sensitivity Analysis. Sandia report SAND87-8248, 1988.