Controlling mesh effects in integrated process and device simulation

International Workshop on Statistical Metrology, Proceedings, IWSM

Volumn , Issue , 1998, Pages 100-103

  Axelrad, V ^a   Duane, M ^a  

^a PDF SOLUTIONS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; OSCILLATIONS; SEMICONDUCTOR DEVICE STRUCTURES;

MESH GENERATION ALGORITHMS;

MOSFET DEVICES;

EID: 0032268773     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (4)