Reliability of vertical MOSFETs for gigascale memory applications

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1998, Pages 939-942

  Goebel, B ^a   Bertagnolli, E ^a   Koch, F ^a  

^a SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DYNAMIC RANDOM ACCESS STORAGE; GATES (TRANSISTOR); OXIDES; SEMICONDUCTOR DEVICE MANUFACTURE;

GIGASCALE MEMORY;

MOSFET DEVICES;

EID: 0032267895     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)