Real time on-chip characterization of time delay arising from multi-level-metallization: Decoupling of pure charging and drift-and-charging

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1998, Pages 287-290

  Lee, Hi Deok ^a   Jang, Myoung Jun ^a   Kang, Dae Gwan ^a   Lee, Young Jong ^a   Hwang, Jeong Mo ^a   Kim, Dae Mann ^a  

^a Hynix Semiconductor Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT TESTING; METALLIZING; MOSFET DEVICES; SUPERCONDUCTING MATERIALS;

MULTILEVEL METALLIZATION (MLM);

ULSI CIRCUITS;

EID: 0032265922     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)