New formulation for accurate numerical extraction of interconnect capacitance in ULSI

Proceedings of the IEEE International Conference on Electronics, Circuits, and Systems

Volumn 3, Issue , 1998, Pages 99-102

  Pham, Hoan H ^a   Nathan, Arokia ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE DENSITY DISTRIBUTIONS; FREDHOLM INTEGRAL EQUATIONS; SINGLE-LAYER POTENTIAL DESCRIPTIONS; APPLICATION AREA; COMPUTATIONAL ACCURACY; COUPLING CAPACITANCE; INTERCONNECT CAPACITANCE; MICRO ELECTROMECHANICAL SYSTEM (MEMS); NUMERICAL ALGORITHMS; ULSI INTERCONNECTS;

ALGORITHMS; CAPACITANCE; COMPUTATIONAL METHODS; ELECTRIC NETWORK ANALYSIS; ELECTRIC NETWORK SYNTHESIS; INTEGRAL EQUATIONS; INTERCONNECTION NETWORKS; COMPUTATIONAL EFFICIENCY; EXTRACTION; MEMS;

ULSI CIRCUITS; CAPACITANCE;

EID: 0032265488     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)

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10. H. Pham and A. Nathan, "Rapid extraction of capacitance in a-Si imaging arrays," IEEE International Symposium on Circuits and Systems, (in press).