Humidity sensing properties of plasma polymer coated surface transverse wave resonators

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1998, Pages 509-512

  Radeva, Ekaterina I ^a   Avramov, Ivan D ^a  

^a INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ATMOSPHERIC HUMIDITY; DESORPTION; GLOW DISCHARGES; HYSTERESIS; PLASMA APPLICATIONS; PLASTIC FILMS; SENSORS; SILICONES; TEMPERATURE CONTROL; ULTRASONIC DEVICES; VAPORS;

HUMIDITY SENSORS; POLYHEXAMETHYLDISILOXANE; SURFACE TRANSVERSE WAVE (STW) RESONATORS;

ACOUSTIC RESONATORS;

EID: 0032265301     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (9)