VLSI process optimization using Taguchi Method with multiple-criteria approach

International Workshop on Statistical Metrology, Proceedings, IWSM

Volumn , Issue , 1998, Pages 96-99

  Chen, Ming Ru ^a  

^a UNITED MICROELECTRONICS CORPORATION   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; OPTIMIZATION; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE;

MULTIPLE-CRITERIA APPROACH; TAGUCHI METHOD;

VLSI CIRCUITS;

EID: 0032264787     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (3)