Influence of interstitial oxygen on the c-axis orientation of sputtered and e-beam evaporated ZnO thin films

IEEE International Symposium on Applications of Ferroelectrics

Volumn , Issue , 1998, Pages 325-328

  Gupta, Vinay ^a   Sreenivas, K ^a   Fahim, M ^a  

^a UNIVERSITY OF DELHI   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL ORIENTATION; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRON BEAMS; ELECTRON SPECTROSCOPY; POLYCRYSTALLINE MATERIALS; SPUTTER DEPOSITION; THIN FILMS; ZINC OXIDE;

ELECTRON BEAM EVAPORATION;

DIELECTRIC FILMS;

EID: 0032264270     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (8)