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Volumn 17, Issue 23, 1998, Pages 2037-2040

Lamp-induced forward transfer: A new approach for deposition of metal films

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; CERAMIC MATERIALS; EXCIMER LASERS; FILM PREPARATION; LASER APPLICATIONS; MASKS; METALLIC FILMS; METALLIZING; MORPHOLOGY; PALLADIUM; PHOTOLYSIS; SURFACE ROUGHNESS;

EID: 0032261746     PISSN: 02618028     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1006637412355     Document Type: Article
Times cited : (10)

References (18)
  • 3
    • 2342656024 scopus 로고
    • "Laser and particle-beam chemical processing for microelectronics", edited by D. J. Ehrlich, G. S. Higashi and M. M. Oprysko Pittsburgh, PA
    • R. J BASEMAN, A. GUPTA, R. C. SAUSA and C. PROGLER, in "Laser and particle-beam chemical processing for microelectronics", edited by D. J. Ehrlich, G. S. Higashi and M. M. Oprysko (MRS Symp. Proc., Vol. 101, Pittsburgh, PA, 1988) p. 237.
    • (1988) MRS Symp. Proc. , vol.101 , pp. 237
    • Baseman, R.J.1    Gupta, A.2    Sausa, R.C.3    Progler, C.4
  • 6
    • 84958483449 scopus 로고
    • "Excimer beam applications", edited by A. N. Pirri and B. P. Piwczyk
    • J. A. GREER and T. E. PARKER, in "Excimer beam applications", edited by A. N. Pirri and B. P. Piwczyk (Proc. SPIE, Vol. 998, 1988) p. 113.
    • (1988) Proc. SPIE , vol.998 , pp. 113
    • Greer, J.A.1    Parker, T.E.2
  • 8
    • 0025680412 scopus 로고
    • "Laser-assisted processing II", edited by L. D. Lande
    • Z. TÓTH, Z. KÁNTOR, P. MOGYORÓSI and T. SZÖRÉNYI, in "Laser-assisted processing II", edited by L. D. Lande (Proc. SPIE, Vol. 1279, 1990) p. 150.
    • (1990) Proc. SPIE , vol.1279 , pp. 150
    • Tóth, Z.1    Kántor, Z.2    Mogyorósi, P.3    Szörényi, T.4
  • 17
    • 2342643084 scopus 로고
    • Thesis, University of Karlsruhe, Germany
    • J.-Y. ZHANG, Thesis, University of Karlsruhe, Germany, 1993.
    • (1993)
    • Zhang, J.-Y.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.