Multiplexed antenna monitoring test structure

International Symposium on Plasma Process-Induced Damage, P2ID, Proceedings

Volumn , Issue , 1998, Pages 205-208

  Simon, P L C ^a   Maly, W ^a   Luchies, J R M ^a   Antheunis, R ^a  

^a NXP SEMICONDUCTORS   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; GATES (TRANSISTOR); INTEGRATED CIRCUIT MANUFACTURE; INTEGRATED CIRCUIT TESTING; LEAKAGE CURRENTS; MOSFET DEVICES; PLASMA ETCHING; SILICON WAFERS; THRESHOLD VOLTAGE;

MULTIPLEXED ANTENNA MONITORING (MAM) TEST STRUCTURE;

CMOS INTEGRATED CIRCUITS;

EID: 0032259918     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)