LIGA fabrication of mm-wave accelerating cavity structures at the Advanced Photon Source (APS)

Proceedings of the IEEE Particle Accelerator Conference

Volumn 1, Issue , 1998, Pages 461-463

  Song, J J ^a   Bajikar, S ^a   Kang, Y W ^a   Kustom, R L ^a   Mancini, D C ^a   Nassiri, A ^a   Lai, B ^a   Feinerman, A D ^a   White, V ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC IMPEDANCE; PHOTONS; SYNCHROTRON RADIATION; X RAY LITHOGRAPHY;

CAVITY STRUCTURES; DEEP X RAY LITHOGRAPHY; MICROFABRICATION; MILLIMETER WAVE CAVITY FABRICATION;

PARTICLE ACCELERATORS;

EID: 0032258806     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (12)