Ceramic based resistive sensors

Journal of Electroceramics

Volumn 2, Issue 4, 1998, Pages 273-282

  Wang, C C ^a   Akbar, S A ^a   Madou, M J ^a  

^a OHIO STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; HIGH TEMPERATURE APPLICATIONS; SEMICONDUCTOR DEVICES; THERMISTORS;

RESISTIVE SENSORS; SMART SENSORS;

CERAMIC PRODUCTS;

EID: 0032258751     PISSN: 13853449     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1009978607621     Document Type: Article

References (46)

1. W. Göpel and K.D. Schierbaum, Sensors: A Comprehensive Survey, Vol. 2, Chemical and Biochemical Sensors (VCH, Weinheim, 1991).
2. T. Ricolfi and J. Scholz, Sensors: A Comprehensive Survey, Vol. 4, Thermal Sensors (VCH, Weinheim, 1990).
3. W. Göpel and J. Hesse (eds), Sensors Update, Vol. 1 (VCH, Weinheim, 1996).
4. H. Baltes, W. Göpel, and J. Hesse (eds), Sensors Update, Vol. 2, (VCH, Weinheim, 1996).
5. M.J. Madou and S.R. Morrison, Chemical Sensing with Solid State Devices (Academic Press, 1989).
6. P. Ciureanu and S. Middlehoek (eds), Thin Film Resistive Sensors (IOP Publishing, 1992).
7. K. Ihokura and J. Watson, The Stannic Oxide Gas Sensor: Principle and Applications (CRC Press, 1992).
8. U. Lampe, M. Fleisher, N. Reitmeier, H. Meixner, J.B. McMonagle, and A. Marsh, in Sensors Update, Vol. 2, (VCH, Weinheim, 1996), p. 1.
9. N. Taguchi, Japanese Patent 45-38200, (1962).
10. W. Göpel and G. Reinhardt, in Sensors Update, Vol. 1, (VCH, Weinheim, 1996), p. 47.
11. M. Prudenziati and B. Morten, Sensors and Actuators, 13, 339 (1988).
12. V. Lantto and T.S. Rantala, Sensors and Actuators, B5, 103 (1991).
13. G. Sberveglieri, Sensors and Acuators B5, 253 (1991).
14. R. Lambrich, W. Hagen, and J. Lagois, in: Proceedings of the International Meeting on Chemical Sensors (Fukuoka, 1993).
15. M. Eagashira, N. Kanehara, Y. Shimitzu, and H. Iwanaga, Sensors and Acuators, 18, 349 (1989).
16. K.D. Schierbaum, U. Weimar, and W. Gopel, Sensors and Acuators, B7, 709 (1992).
17. G. Sberveglieri, G. Faglia, S. Groppelli, and P. Nelli, Sensors and Actuators, B8, 79 (1992).
18. G. Williams and G.S.V. Coles, Sensors and Acuators, B15-16, 349 (1993).
19. G. Sberveglieri, S. Groppelli, and P. Nelli, Sensors and Actuators, B4, 457 (1991).
20. G. Wiegleb and J. Heitbaum, Sensors and Actuators, B17, 93 (1994).
21. H. Torrela, C. Poijolet, and R. Laouze, Sensors and Actuators, B4, 445 (1991).
22. G. Sberveglieri, Sensors and Acuators, B6, 239 (1992).
23. T. Maekawa, J. Tamaki, N. Miura, N. Yamazoe, and S. Matsushima, B9, 63 (1992).
24. G. Sberveglieri, G. Faglia, S. Groppelli, P. Nelli, and A. Taroni, Sensors and Actuators B7, 721 (1992).
25. N.-H. Chan, R.K. Sharma, and D.M. Smyth, J. Electrochem. Soc., 128, 1762 (1981).
26. F.A. Kröger, The Chemistry of Imperfact Crystals (North-Holland Pub., New York, 1974).
27. Y. Shimizu, Y. Nakamura, and M. Egashira, Sensors and Actuators, B13-14, 128 (1993).
28. S. Saito, M. Miyayama, K. Koumoto, and H. Yanagida, J. Am. Ceram. Soc., 68, 40 (1985).
29. L.D. Birkefeld, A.M. Azad, and S.A. Akbar, J. Am. Ceram. Soc., 75, 2964 (1992).
30. A.M. Azad, S.A. Akbar, and L.B. Younkman, Interface 31, December (1994).
31. S.A. Akbar, A.M. Azad, and L.B. Younkman, A Solid-State Gas Sensor for Carbon Monoxide and Hydrogen, US patent # 5,439,580, August 8 (1995).
32. S.A. Akbar and L.B. Younkman, J. Electrochem. Soc., 144, 1750 (1997).
33. H.B. Sachse, Semiconducting Temperature Sensors and Their Applications (Wiley, New York, 1975).
34. A.J. Moulson and J.M. Herbert, Electroceramics (Chapman Hall, New York, 1990) pp. 140-147.
35. C.C. Wang, S.A. Akbar, W. Chen, and R.J. Schorr, Sensors and Actuators, A58, 237 (1997).
36. A. Hierlemann, M. Schweizer-Berberich, U. Weimar, G. Kraus, A. Pfau, and W. Göpel, in Sensors Update, Vol. 2, edited by H. Baltes, W. Göpel, and J. Hesse (VCH, Weinheim, 1996).
37. C. Holt and M.S. Thesis, The Ohio State University, Columbus, OH, (1997).
38. P.K. Clifford, Selective gas detection and measurement system, US Patent, 4, 542, 640, (1984).
39. R. Quinn, M. Madou, A. Ricco, A. Zent, B. Chen, and R. White, presented at 192nd Meeting of The Electrochemical Society, Paris, (1997).
40. Microsensor Systems Incorporated, 62 Corporate Court, Bowling Green, KY 42103.
41. M. Madou and S.R. Morrison, Chemical Sensing with Solid State Devices (Academic Press, 1989).
42. J.W. Gardner, H.V. Shurmer, and P. Corcoran, Sensors and Actuators, B4, 117, (1991).
43. Q. Wu, K-M. Lee, and C-C. Liu, Sensors and Actuators, B13-14, 1-6, (1993).
44. S.B. Crary, Recent advances and future prospects for tin-oxide gas sensors, General Motors Report GMR-5556.
45. S.M. Sze, VLSI Technology, (McGraw-Hill Book Company, 1988).
46. M. Madou, Fundamentals of Microfabrication (CRC Press, 1997).