Remote PECVD silicon nitride films with improved electrical properties for GaAs P-HEMT passivation

Journal of the Korean Physical Society

Volumn 33, Issue SUPPL. 2, 1998, Pages

  Sohn, Myoung Kyu ^a   Lee, Jae Hak ^a   Kim, Kyung Hwan ^a   Yang, Sung Gi ^a   Seo, Kwang Seok ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032258642     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

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