Influence of physical parameters of RF plasma discharge on PET surface modification

Zhenkong Kexue yu Jishu Xuebao/Vacuum Science and Technology

Volumn 18, Issue 5, 1998, Pages 373-376

  Zhang, Liang ^a   Wang, Jianqi ^a   Zhang, Xinsheng ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MODIFICATION; PLASMA APPLICATIONS; POLYMERIZATION; SURFACE PROPERTIES;

DEPOSITION RATIO; RADIO FREQUENCY PLASMA;

ELECTRIC DISCHARGES;

EID: 0032257816     PISSN: 02539748     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)