Effective defect detection and classification methodology based on integrated laser scanning inspection and automatic defect classification

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1998, Pages 266-271

  Fan, Yong Hui ^a   Moalem, Yoel ^a  

^a KLA TENCOR CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; INSPECTION; LASER DIAGNOSTICS; VLSI CIRCUITS;

AUTOMATIC DEFECT CLASSIFICATION (ADC); DEFECT INSPECTION; WAFER INSPECTION;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0032257663     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)