Study on photoluminescence from N-implanted Si surface

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 19, Issue 9, 1998, Pages 667-671

  Liu, Yuzhen ^a   Shi, Wanquan ^a   Chen, Zhijian ^a   Yao, Decheng ^a   Liu, Jinlong ^a   Xie, Kan ^a   Liu, Zhenxiang ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ION IMPLANTATION; PHOTOLUMINESCENCE;

RAPID THERMAL ANNEALING; SEMICONDUCTING SILICON FILM;

SEMICONDUCTING SILICON;

EID: 0032256972     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)