Human based knowledge for the probe failure pattern classification with the use of a backpropagation neural network. Application on submicron linear technologies

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1998, Pages 165-170

  Ortega, Carlos ^a   Alonso Montull, J Ignacio ^a   Sobrino, Eliseo ^a  

^a NOKIA RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BACKPROPAGATION; COST EFFECTIVENESS; INSPECTION; NEURAL NETWORKS; PATTERN RECOGNITION; SILICON WAFERS;

SUBMICRON LINEAR TECHNOLOGY;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032256953     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)