Foundry technology for the next decade

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1998, Pages 321-324

  Sun, Jack Y C ^a   Chiang, Shang Yi ^a   Liu, Mark ^a  

^a TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; TRANSISTORS;

FOUNDRY TECHNOLOGY;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0032256632     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)