Sidewall angle measurements using CD SEM

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1998, Pages 259-261

  Su, Bo ^a   Pan, Tony ^a   Li, Ping ^a   Chinn, Jeff ^a   Shi, Xuelong ^a   Dusa, Mircea ^a  

^a APPLIED MATERIALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE MEASUREMENT; ATOMIC FORCE MICROSCOPY; SCANNING ELECTRON MICROSCOPY;

CRITICAL DIMENSION SCANNING ELECTRON MICROSCOPES (CD SEM);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032256269     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)