Backside laserprober characterization of thermal effects during high current stress in Smart Power ESD protection devices

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1998, Pages 691-694

  Furbock, C ^a   Seliger, N ^a   Pogany, D ^a   Litzenberger, M ^a   Gornik, E ^a   Stecher, M ^a   Gossner, H ^a   Werner, W ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTROSTATICS; TEMPERATURE DISTRIBUTION; THERMAL EFFECTS;

HIGH CURRENT STRESS; NONINVASIVE INFRARED BACKSIDE LASERPROBER METHOD; SMART POWER ELECTROSTATIC DISCHARGE (ESD) PROTECTION STRUCTURES;

ELECTRIC EQUIPMENT PROTECTION;

EID: 0032254715     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)