Charge trapping in interpoly ONO film

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE

Volumn , Issue , 1998, Pages 42-46

  Lira, K S ^a   Ling, C H ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; ELECTRIC CURRENTS; HOLE TRAPS; INTERFACES (MATERIALS); NITRIDES; OXIDES; STRESSES;

CHARGE TRAPPING; INTERPOLY OXIDE/NITRIDE/OXIDE (ONO) FILMS;

CAPACITORS;

EID: 0032231573     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (8)