Characterization of defects in PECVD-SiO2 coatings on PET by confocal microscopy

Plasmas and Polymers

Volumn 3, Issue 4, 1998, Pages 231-247

  Da Silva Sobrinho, A S ^a   Chasle, J ^a,b   Dennler, G ^a   Wertheimer, M R ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^b PAPRICAN   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC COATINGS; DEFECTS; ELECTRON MICROSCOPY; OPTICAL MICROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REACTIVE ION ETCHING;

CONFOCAL MICROSCOPY;

SILICA;

EID: 0032231110     PISSN: 10840184     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1021854805605     Document Type: Article

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