Resistance characteristics of the Ni-Cr thin films and their influence on the integrated circuits

International Conference on Solid-State and Integrated Circuit Technology Proceedings

Volumn , Issue , 1998, Pages 123-126

  Zhao, Lixin ^a   Shen, Guangdi ^a   Gao, Guo ^a   Xu, Chen ^a   Du, Jinyu ^a   Zou, Deshu ^a   Chen, Jianxin ^a  

^a BEIJING UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CONDENSATION; DIELECTRIC MATERIALS; ELECTRIC IMPEDANCE MEASUREMENT; EVAPORATION; MAGNETRON SPUTTERING; MICROWAVE MEASUREMENT; NICKEL COMPOUNDS; OXIDATION; SILICA; SUBSTRATES; VACUUM;

CARRIER TUNNEL TRANSPORT; SHEET RESISTANCE; STRIP LINE MICROWAVE IMPEDANCE;

THIN FILMS;

EID: 0032226928     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (6)