Low power polysilicon sources for IR applications

International Conference on Solid-State and Integrated Circuit Technology Proceedings

Volumn , Issue , 1998, Pages 884-886

  Das, N C ^a   Jhabvala, M ^a   Robinson, D ^a   Shu, P ^a  

^a RAYTHEON COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC RESISTANCE; INFRARED RADIATION; LIGHT EMISSION; MICROMACHINING; OPTICAL FILMS; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; SILICA; THIN FILM DEVICES;

THIN FILM INFRARED SOURCES;

LIGHT SOURCES;

EID: 0032226898     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (8)