Micro electromechanical systems (MEMS): Technology and future applications in circuits

International Conference on Solid-State and Integrated Circuit Technology Proceedings

Volumn , Issue , 1998, Pages 928-931

  Liu, Chang ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNAS; ELECTRIC SWITCHES; INSERTION LOSSES; INTEGRATED CIRCUITS; WAVEGUIDES;

ELECTROMECHANICAL RADIO FREQUENCY SWITCHES; PLANAR WAVEGUIDES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032226837     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (4)