Synthesis and analysis of SiGeC

International Conference on Solid-State and Integrated Circuit Technology Proceedings

Volumn , Issue , 1998, Pages 2-5

  Kouvetakis, John ^a   Mayer, James ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; HIGH RESOLUTION ELECTRON MICROSCOPY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTING GERMANIUM COMPOUNDS; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SYNTHESIS (CHEMICAL); TERNARY SYSTEMS; TRANSMISSION ELECTRON MICROSCOPY; VACUUM TECHNOLOGY; X RAY DIFFRACTION ANALYSIS;

HETEROEPITAXIAL LAYERS;

SEMICONDUCTING FILMS;

EID: 0032226812     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (0)