Formation and properties of ternary silicide (CoxNi1-x)Si2 thin films

International Conference on Solid-State and Integrated Circuit Technology Proceedings

Volumn , Issue , 1998, Pages 271-274

  Mo, Hong Xiang ^a   Qu, Xin Ping ^a   Liu, Jian Hai ^a   Ru, Guo Ping ^a   Li, Bing Zong ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COBALT ALLOYS; CRYSTAL ORIENTATION; ELECTRIC CONDUCTIVITY OF SOLIDS; LATTICE CONSTANTS; MULTILAYERS; RAPID THERMAL ANNEALING; SEMICONDUCTING SILICON COMPOUNDS; SUBSTRATES; TERNARY SYSTEMS; THERMODYNAMIC STABILITY; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

CHEMICAL SELECTIVE ETCHING;

SEMICONDUCTING FILMS;

EID: 0032226795     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (6)