Study of single-chip integrated microfluidic system

International Conference on Solid-State and Integrated Circuit Technology Proceedings

Volumn , Issue , 1998, Pages 895-898

  Pang, Jiangtao ^a   Zou, Quanbo ^a   Tan, Zhimin ^a   Qian, Xin ^a   Liu, Litian ^a   Li, Zhijian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BIMETALS; ELECTROSTATICS; FLUIDICS; MICROPROCESSOR CHIPS; MICROSENSORS; PUMPS; VALVES (MECHANICAL);

MICROPUMPS; MICROVALVES; SINGLE CHIP INTEGRATED MICROFLUIDIC SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032226793     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (3)