High-temperature pressure and temperature multi-function sensors

International Conference on Solid-State and Integrated Circuit Technology Proceedings

Volumn , Issue , 1998, Pages 947-949

  Liu, Xiaowei ^a   Wang, Wei ^a   Wang, Xilian ^a   Liu, Yuqiang ^a   Liu, Zhenmao ^a   Fan, Maojun ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

PIEZOELECTRIC TRANSDUCERS; PRESSURE TRANSDUCERS; RESISTORS; SILICON ON INSULATOR TECHNOLOGY; THERMOMETERS;

MULTIFUNCTION SENSORS; PRESSURE SENSORS; TEMPERATURE SENSORS;

SILICON SENSORS;

EID: 0032226716     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)