Investigation of KOH anisotropic etching of Si 〈100〉 wafers for improving etched surface quality

International Conference on Solid-State and Integrated Circuit Technology Proceedings

Volumn , Issue , 1998, Pages 127-130

  Wang, Wei ^a   Liu, Xiaowei ^a   Wang, Xilian ^a   Liu, Yuqiang ^a   Fan, Maojun ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CRYSTAL ORIENTATION; ETCHING; MASKS; POTASSIUM COMPOUNDS; SILICON NITRIDE; SOLUTIONS;

SILICON MEMBRANE ETCHING;

SILICON WAFERS;

EID: 0032226667     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (4)